MC-539 MICRO & NANO ELECTRO-MECHANICAL SYSTEMS
Credit Hours = 3
COURSE CONTENT
- Introduction: Evolution of Micro-sensors and Micro-actuators, MEMS Overview, Emergence of Micro-machines, MEMS Applications; Fundamentals of MEMS Fabrication: Introduction and Description of Basic Processes, Bulk Micromachining, Surface Micromachining, Micro-stereo Lithography for MEMS.
- Principles of Micro-sensors and Their Fabrication: Fabrication, Examples of Micro-sensors; Principles of Micro-actuators: Electric Field Driven Actuators, Piezoelectric and Magnetic Field Driven Actuator, Examples of Micro-actuators.
- Computer Aided Design of MEMS: Modelling, Analysis and Simulation, MEMS Design Layout, MEMS Design Simulation using Finite Element Analysis.
- Nano-materials & Nanotechnology: Perspectives of Nanotechnology, History of nano-materials, The Business of Nanotechnology, present and future applications of nano-materials.
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